教师名录

李其超

所属二级机构:复合材料研究所
通讯地址:东川路800号williamhill威廉希尔官网D楼
电子邮箱:liqichao@sjtu.edu.cn
当前为硕士生导师。研究方向主要为半导体制备工艺、晶圆级微机电器件(MEMS)、信息感知材料、电路系统设计、人工智能算法、便携式/穿戴式无线智能仪器系统等。面向电子信息和医疗健康等行业,开发晶圆级微纳制备工艺、晶圆级微纳化学/物理传感器、MEMS压电换能器、信号处理电路与人工智能算法、气体传感电子鼻系统、手持式振动监测仪器、微型压电微泵/风扇器件、微型制动器/机器人等应用。作为负责人主持国家重点研发计划子任务课题、国家自然科学基金、上海市科委启明星项目(扬帆专项)、华为战略研究院项目、其他重点企业横向项目等多项科研项目,平均每年以第一/通讯作者发表SCI论文超过3篇。招收具有材料、化学、机械、物理、电子科学与技术、计算机科学与技术等相关专业背景的学生,可以零基础,重在感兴趣,本课题入门较快。欢迎联系,当前仍有名额,联系方式:liqichao@sjtu.edu.cn
教育经历
  • 2017年-2021年,威廉体育williamhill官网 仪器科学与技术 博士
工作经历
  • 2021年-2023年,威廉体育williamhill官网 电子信息与电气工程学院 电子科学与技术专业,博士后
  • 2023年-至今,威廉体育williamhill官网 williamhill威廉希尔官网 复合材料研究所,助理研究员 (硕士生导师)
研究方向
  • 半导体微纳加工工艺(光刻、磁控溅射、化学气相沉积、干湿法刻蚀、晶圆键合等)
  • 晶圆级微纳电子器件设计与制备(半导体传感器、MEMS器件、压电微泵/风扇系统、微型驱动器/机器人等)
  • 信息感知材料、电路系统和人工智能算法设计(柔性传感器、多功能电路设计、人工智能算法)
研究情况

当前为硕士生导师。研究方向主要为半导体制备工艺、晶圆级微机电器件(MEMS)、信息感知材料、电路系统设计、人工智能算法、便携式/穿戴式无线智能仪器系统等。面向电子信息和医疗健康等行业,开发晶圆级微纳制备工艺、晶圆级微纳化学/物理传感器、MEMS压电换能器、信号处理电路与人工智能算法、气体传感电子鼻系统、手持式振动监测仪器、微型压电微泵/风扇器件、微型制动器/机器人等应用。作为负责人主持国家重点研发计划子任务课题、国家自然科学基金、上海市科委启明星项目(扬帆专项)、华为战略研究院项目、其他重点企业横向项目等多项科研项目,平均每年以第一/通讯作者发表SCI论文超过3篇。招收具有材料、化学、机械、物理、电子科学与技术、计算机科学与技术等相关专业背景的学生,可以零基础,重在感兴趣,本课题入门较快。欢迎联系,当前仍有名额,联系方式:liqichao@sjtu.edu.cn

论文信息
  • Rapid Fabrication ofAntifreezing Piezoionic Hydrogels for Fast Charging and Enhanced Energy Harvesting Frequency via Ion-Regulating Nanoparticles. Advanced. Functional. Materials. 2025, e15804.
  • A Flexible Single‐Sensor MEMS E‐Nose with Dual‐Temperature Modulation for VOCs Classification and Breath‐Based Silent Communication. Small, 2025, 2505098.
  • Ultra‑High Sensitivity Anisotropic Piezoelectric Sensors for Structural Health Monitoring and Robotic Perception. Nano-Micro Letters. 17 (2025), 42.
  • Super P carbon nanoparticles activated hydrogel sensors for developing fully integrated wearable electronics via an in-situ writing strategy. Chemical Engineering Journal 508 (2025) 161060.
  • Discrimination of VOCs with e-nose consisting of a single MEMS sensor using lightweight deep learning model based on SqueezeNet. Sensors & Actuators: B. Chemical 422 (2025) 136640.
  • A breathable, waterproof and battery-free wearable e-nose with high flexibility based on MEMS gas sensors for accurate identification of volatile aromatic hydrocarbons. Applied Materials Today 42 (2025) 102527.
  • Highly sensitive and omnidirectional anisotropic piezoelectric sensors based on oriented PbZr0.52Ti0.48O3 fibers with intrinsic flexibility. Journal of Alloys and Compounds 1022 (2025) 179905.
  • A Battery-Free, Wireless, Flexible Bandlike E-Nose Based on Mems Gas Sensors for Precisely Volatile Organic Compounds Detection." Nano Energy 127 (2024): 109711.
  • Ag-Modified 3D Reduced Graphene Oxide Aerogel-Based Sensor with an Embedded Microheater for a Fast Response and High-Sensitive Detection of NO2, ACS Applied Materials & Interfaces, 2020, 12(22): 25243-25252.
  • Sensitive strain sensors with wide-range detection and high stability for intelligent human motion monitoring. Sensors & Actuators: A. Physical. 2024, 377, 115710.
  • Programmable Adaptive Anti-Retention Module for Capsule Endoscopy Based on Durable and Ultra-Wide Range Pressure Sensor, IEEE Sensors Journal, 24 (2024) 15167-15174.
  • Flexible pressure sensors based on reduced graphene oxide @ porous silicone elastomers with good resolution and wide working range, Sensors & Actuators: A. Physical, 366, 2024, 114991.
  • High-Performance Infrared Detectors Based on Black Phosphorus/Carbon Nanotube Heterojunctions, Nanomaterials, 2023, 13, 2700.
  • Black Phosphorus Field-Effect Transistors with Improved Contact via Localized Joule Heating, Nanomaterials, 2023, 13, 2607.
  • Ru Doped Aluminum Nitride Mmonolayer for Detecting and Scavenging SF6 Decomposition Components. Surfaces and Interfaces, 2023, 36, 102514.
  • High-Sensitive Wearable Strain Sensors Based on Carbon Nanotubes@Porous Soft Silicone Elastomer with Excellent Stretchability, Durability and Biocompatibility, ACS Applied Materials & Interfaces, 2022, 14(45), 51373−51383.
  • Highly Sensitive Sensor Based on Ordered Porous ZnO Nanosheets for Ethanol Detecting Application, Sensors and Actuators B: Chemical, 2021, 326: 128952.(入选为ESI高被引论文)
  • Highly Sensitive and Flexible Piezoresistive Pressure Sensors Based on 3D Reduced Graphene Oxide Aerogel, IEEE Electron Device Letters, 2021, 42(4): 589-592.
  • Nitrogen Dioxide Gas Sensor Based on Ag-Doped Graphene: A First-Principle Study, Chemosensors, 2021, 9(8): 227.
  • Fabrication of 3D Electro-Thermal Micro Actuators in Silica Glass by Femtosecond Laser Wet Etch and Microsolidics, Second International Conference on Photonics and Optical Engineering. International Society for Optics and Photonics, 2017, 10256, 102563S.
荣誉信息
  • 2023年,上海市青年科技英才扬帆计划
  • 2021年,上海市“超级博士后”激励计划